Structure of Ti and Al Films Prepared by Cylindrical Sputtering System
نویسندگان
چکیده
منابع مشابه
Deposition of Al/Cu Multilayer By Double Targets Cylindrical DC Magnetron Sputtering System
A cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. The substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. The Al/ Cu multilayer film was deposited on the glass substrate at the following conditions: Working g...
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a cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. the substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. the al/ cu multilayer film was deposited on the glass substrate at the following conditions: working g...
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ژورنال
عنوان ژورنال: Korean Journal of Materials Research
سال: 2014
ISSN: 1225-0562
DOI: 10.3740/mrsk.2014.24.7.344